HEXAPOD (6-DOF STAGE) JHX - Series motorized stage for semiconductor industry

HEXAPOD (6-DOF STAGE) JHX - Series motorized stage for semiconductor industry | productronica China HEXAPOD (6-DOF STAGE) JHX - Series motorized stage for semiconductor industry,Motion Control & Drive Technology,productronica China HEXAPOD (6-DOF STAGE) JHX, the six-degree-of-freedom platform, is a high-precision alignment platform independently developed by our Korean Cooperation company Mentor. It is widely used in the semiconductor industry. It can achieve six-axis free precision displacement of X ± 16mm ǀ Y ± 16mm ǀ Z ± 6mm (12mm) ǀ θX ± 8° ǀ θY ± 8° ǀ θZ ± 20°. It can achieve the Minimum incremental motion: X 0.1μm ǀ Y 0.1μm ǀ Z 0.1μm ǀ θX µrad (0.0001°) ǀ θY µrad (0.0001°) ǀ θZ µrad (0.0001°), and the Unidirectional repeatability: X ± 0.9 μm ǀ Y ± 0.9 μm ǀ Z ± 0.9 μm ǀ θX ± 20 µrad (0.001°) ǀ θY ± 20 µrad (0.001°) ǀ θZ ± 30 µrad (0.0015°). It is an indispensable and powerful assistant in the semiconductor industry!

Product Introduction

HEXAPOD (6-DOF STAGE) JHX - Series motorized stage for semiconductor industry

HEXAPOD (6-DOF STAGE) JHX, the six-degree-of-freedom platform, is a high-precision alignment platform independently developed by our Korean Cooperation company Mentor. It is widely used in the semiconductor industry. It can achieve six-axis free precision displacement of X ± 16mm ǀ Y ± 16mm ǀ Z ± 6mm (12mm) ǀ θX ± 8° ǀ θY ± 8° ǀ θZ ± 20°. It can achieve the Minimum incremental motion: X 0.1μm ǀ Y 0.1μm ǀ Z 0.1μm ǀ θX µrad (0.0001°) ǀ θY µrad (0.0001°) ǀ θZ µrad (0.0001°), and the Unidirectional repeatability: X ± 0.9 μm ǀ Y ± 0.9 μm ǀ Z ± 0.9 μm ǀ θX ± 20 µrad (0.001°) ǀ θY ± 20 µrad (0.001°) ǀ θZ ± 30 µrad (0.0015°). It is an indispensable and powerful assistant in the semiconductor industry!

2026 New Product

Product Category:

Motion Control & Drive Technology

Application Area:

Industrial Electronics

Communication Systems

Computers&Peripherals

Medical Technology

New Energy

Aviation&Space Technology

Mechanical Engineering

Exhibitor Profile

Dongguan C & K mechatronix Co., Ltd.
东莞市诚鲲五金电子科技有限公司

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Our Booth No.

W3 .
3768

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