CFW820 Pattern Wafer Defect Inspection System (Series 820) | productronica Shanghai CFW820 Pattern Wafer Defect Inspection System (Series 820),Test and measurement, quality assurance,productronica Shanghai The CFW820 is an optical inspection system for defect monitoring on FAB production lines, applicable to multiple process stations such as CMP and OQC. It helps customers rapidly screen typical pattern and surface defects that compromise product quality on the line, ensuring the stable operation of all manufacturing processes. Boasting ultra-high compatibility for wafer handling, the CFW820 supports Thin, Taiko and Standard wafers and is configured with multiple optical magnification levels. Its industry-leading dual-chamber design features dual-channel parallel inspection capability, striking an optimal balance between inspection sensitivity and throughput – with a throughput 1.5 times that of competitors at the same inspection resolution. Combined with flexible and user-friendly recipe management and visual fine tune functions, it drives yield improvement in customers’ production processes and has earned high recognition from clients.

Product Introduction

CFW820 Pattern Wafer Defect Inspection System (Series 820)
The CFW820 is an optical inspection system for defect monitoring on FAB production lines, applicable to multiple process stations such as CMP and OQC. It helps customers rapidly screen typical pattern and surface defects that compromise product quality on the line, ensuring the stable operation of all manufacturing processes. Boasting ultra-high compatibility for wafer handling, the CFW820 supports Thin, Taiko and Standard wafers and is configured with multiple optical magnification levels. Its industry-leading dual-chamber design features dual-channel parallel inspection capability, striking an optimal balance between inspection sensitivity and throughput – with a throughput 1.5 times that of competitors at the same inspection resolution. Combined with flexible and user-friendly recipe management and visual fine tune functions, it drives yield improvement in customers’ production processes and has earned high recognition from clients.
Conventional Products
Product Category:
Test and measurement, quality assurance
Application Area:
Industrial Electronics

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