**Bright-field Nano Pattern Defect Inspection System — CFW921 | productronica Shanghai **Bright-field Nano Pattern Defect Inspection System — CFW921,Test and measurement, quality assurance,productronica Shanghai CFW921 is a high-performance front-end pattern defect inspection system for semiconductor FAB applications. It is equipped with dual-channel TDI high-resolution sensors and adopts bright-field/dark-field simultaneous imaging technology, enabling simultaneous capture of bright-field and dark-field images in a single scan to detect more defects. It is suitable for multiple process stages such as ADI/AEI in semiconductor front-end manufacturing, helping customers quickly identify typical pattern defects and surface defects that affect product quality, ensuring stable process operation. The system supports 2X/5X/10X/20X scanning magnifications to meet high-throughput and high-sensitivity defect detection requirements. It also integrates iDO auto-classification and die-to-die comparison algorithms, is compatible with 8-inch / 12-inch wafers, and helps improve production yield.

Product Introduction

**Bright-field Nano Pattern Defect Inspection System — CFW921
CFW921 is a high-performance front-end pattern defect inspection system for semiconductor FAB applications. It is equipped with dual-channel TDI high-resolution sensors and adopts bright-field/dark-field simultaneous imaging technology, enabling simultaneous capture of bright-field and dark-field images in a single scan to detect more defects. It is suitable for multiple process stages such as ADI/AEI in semiconductor front-end manufacturing, helping customers quickly identify typical pattern defects and surface defects that affect product quality, ensuring stable process operation. The system supports 2X/5X/10X/20X scanning magnifications to meet high-throughput and high-sensitivity defect detection requirements. It also integrates iDO auto-classification and die-to-die comparison algorithms, is compatible with 8-inch / 12-inch wafers, and helps improve production yield.
Conventional Products
Product Category:
Test and measurement, quality assurance
Application Area:
Industrial Electronics

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